Scanning Electron Microscope (SEM)
Order Code: 23246557.1
Category: General Lab Equipment II
Scanningelectronmicroscopewiththefollowingcharacteristics: Fullycomputercontrolledmicroscopewithtungstenfilamentorequivalent,bothforhighvacuumandlowvacuumapplications Highvacuumresolution:min.3nmat30kVandmin.8nmat3kV Resolution in variable p...
SPECIFICATION
- Scanningelectronmicroscopewiththefollowingcharacteristics:
- Fullycomputercontrolledmicroscopewithtungstenfilamentorequivalent,bothforhighvacuumandlowvacuumapplications
- Highvacuumresolution:min.3nmat30kVandmin.8nmat3kV
- Resolution in variable pressure: 3.5nm at 30kV
- Magnification range from 3x or below to at least 1,000,000x
- Field of view of at least 7mm at a working distance of 10mm
- Energyrangeoftheelectronbeam:from200eVorbelowtoat least 30keV
- Test current from 1pA or below to at least 2uA
- Thesamplecurrentcanbecontinuouslyadjustedfromthesoftwareinterface,withouttheneedforanymechanicalinterventions(centering)onthecolumnperformedbytheuser.
- Itdoesnotrequireanaperturesystemforthedifferentimagingmodes,oriftheyareneeded,theyareheatedinorderto avoid their contamination
- Softwareforreal-timecalculationofthesizeofthespotonthe sample
- Scanspeedof20nsorbelowuptoatleast10msperpixeladjustable in steps and continuously
- Highvacuummodeandlowvacuummodeuptoatleast500Pa
- SampleplatewithmotorizedmovementintheXaxisofatleast60mm,intheYaxisofatleast60mmandcontinuousrotation 3600
- Movement on the Z axis of at least 50mm
- Left-right inclination of at least 800 in each direction
- Maximum sample height: at least 50mm
- Detectors included in delivery:
- secondary electron detector
- picoammeter for measuring the test current
- touchalarm–stopsthemovementifthereisanytouchinthe sample room
- Maximum image size of at least 16k x 16k pixels
- Automationssuchas:continuousadjustmentofspotsizeandcurrent,focusing,astigmatism,contrast-brightness,filamentheating and centering, cannon and column centering, etc.
- Software: measurements, image processing, etc.
- Includes PC with monitor, keyboard and mouse and UPS
- EDX specific features:
- X-raydetectorwithoutliquidnitrogen,resolutionof129eVor better, active area of a little 30mm 2
- X-raydetectorsoftware:toallowelementalanalysisonaregion, on a point, on a line and mapping, creation of analysis reports.
- EBL specific features:
- Advancedsoftwareforelectronlithographythatcangenerategeometricshapes,bitmapimages,text,alignmentmarkers
- Minimumdwelltimeperpixelof20ns/pixelorlessforanyshape
- Multiple adjacent writing fields (stitching)
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